Depth estimation from a single sem image using pixel-wise fine-tuning with multimodal data

HIGHLIGHTS

  • who: Tim Houben from the Eindhoven University of Technology, Eindhoven, The Netherlands have published the research: Depth estimation from a single SEM image using pixel-wise fine-tuning with multimodal data, in the Journal: (JOURNAL)
  • what: The aim of this work is to investigate whether sufficient 3D information is present in a single SEM image for accurate surface reconstruction of the device topology. The authors demonstrate that the proposed neural network architecture together a tailored training procedure leads to accurate depth predictions. The authors demonstrate a weakly supervised domain adaptation technique, to incorporate the OCD . . .

     

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