Depth profiling of cr-ito dual-layer sample with secondary ion mass spectrometry using mev ions in the low energy region

HIGHLIGHTS

• who: Marko Barac from the Ruu0111er Bou0161koviu0107 Institute have published the article: Depth profiling of Cr-ITO dual-layer sample with secondary ion mass spectrometry using MeV ions in the low energy region, in the Journal: Scientific Reports Scientific Reports of 18/03/2022
• what: | Vol:.(1234567890) (2022) 12:11611 |

SUMMARY

| 1 Vol.:(0123456789) Experimental and methods A dual-layer Cr-ITO sample was prepared by magnetron sputtering of roughly 50 nm Cr on top of 150 nm ITO ­(In2O5Sn), deposited on a soda-lime glass substrate. The sample was first . . .

 



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