Design and development of a moems accelerometer using soi technology

HIGHLIGHTS

• who: Josu00e9 Mireles et al. from the Applied Science and Research Center, Instituto de Ingenieru00eda y Tecnologu00eda, Universidad Autu00f3noma de Ciudad Juu00e1rez, Avenida del Charro, Ciudad Juu00e1rez, Mexico have published the research: Design and Development of a MOEMS Accelerometer Using SOI Technology, in the Journal: Micromachines 2023, 14, 231. of /2023/
• what: The experiment was not conducted under vacuum conditions; thus, c 6=0, and the phase shift at u03c9=u03c9r was lower than 90u25e6. The authors implemented an algorithm coded in LabVIEWTM, which is based on the fitting of a synthetic interferogram to the . . .
  

   

  

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