Design and fabrication of a novel poly-si microhotplate with heat compensation structure

HIGHLIGHTS

  • who: Xiaorui Lu and colleagues from the Chinese Academy of Sciences, Beijing, China Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences have published the paper: Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure, in the Journal: Micromachines 2022, 2090 of /2022/
  • what: In this paper a novel design of membrane microhotplates with a heat compensation structure was reported. The aim of this work was to design and fabricate the microhotplate and the thermal and electrical performance of the microhotplates were also investigated.
  • how . . .

     

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