Design and fabrication of an integrated hollow concave cilium mems cardiac sound sensor

HIGHLIGHTS

  • who: Bo Wang and collaborators from the State Key Laboratory of Dynamic Measurement Technology, School of Instrument and Electronics, North University of China, Taiyuan, China have published the research: Design and Fabrication of an Integrated Hollow Concave Cilium MEMS Cardiac Sound Sensor, in the Journal: Micromachines 2022, 2174 of /2022/
  • what: The authors investigated a new type of MEMS sensor that is also capable of capturing heart sounds, thus enriching the information obtained through MEMS technology. To conclude, this study designed a MEMS cardiac sound sensor with a hollow concave cilium.
  • how: COMSOL . . .

     

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