Design and optimization of tool-embedded thin-film strain sensor substrate structure

HIGHLIGHTS

  • who: Zhenyu He and colleagues from the School of Mechanical Engineering, North University of China, Taiyuan, China have published the research work: Design and Optimization of Tool-Embedded Thin-Film Strain Sensor Substrate Structure, in the Journal: Micromachines 2023, 2023, 14, 14, xx FOR FOR PEER PEER REVIEW REVIEW Micromachines of /2023/
  • what: The aim of the substrate function area is to carry the measurement-sensitive device, improve the strain performance, and better map the cutting force. In this paper, the design theory and optimization method of the substrate structure of the tool-embedded thin . . .

     

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