HIGHLIGHTS
- who: J. J. Valle from the (UNIVERSITY) have published the Article: Design, fabrication, characterization and reliability study of CMOS-MEMS Lorentz-force magnetometers, in the Journal: (JOURNAL)
- what: The authors show this process can achieve yields above 95 % when the proper techniques are adopted. Most of the characterization, analysis and tests were focused on the z and xy variant. a Fm iL By
- how: This article presents several techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. Showed that the z-yield is high but the . . .
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