Design of a high sensitivity pirani gauge based on vanadium oxide film for high vacuum measurement

HIGHLIGHTS

  • who: Song Guo et al. from the School of Microelectronics, Shanghai University, Shanghai, China have published the paper: Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement, in the Journal: Sensors 2022, 22, x FOR PEER REVIEW of /2022/
  • what: We tested the sheet resistance of the VOx film as a function of temperature and used it in simulation software to determine the electrical performance of our designed Pirani gauge.
  • how: The authors carried out simulation experiments the thermal zone of the Pirani the width of . . .

     

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