HIGHLIGHTS
- who: Song Guo et al. from the School of Microelectronics, Shanghai University, Shanghai, China have published the paper: Design of a High Sensitivity Pirani Gauge Based on Vanadium Oxide Film for High Vacuum Measurement, in the Journal: Sensors 2022, 22, x FOR PEER REVIEW of /2022/
- what: We tested the sheet resistance of the VOx film as a function of temperature and used it in simulation software to determine the electrical performance of our designed Pirani gauge.
- how: The authors carried out simulation experiments the thermal zone of the Pirani the width of . . .
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