HIGHLIGHTS
- who: Gang Li et al. from the Lanzhou Institute of Physics, Lanzhou, China have published the article: Design of pressure-sensing diaphragm for MEMS capacitance diaphragm gauge considering size effect, in the Journal: AIP Conference Proceedings 1724, 020118 (2016) of 26/03/2018
- what: In this paper, the design of the pressure-sensing diaphragm for a MEMS CDG was optimized under simulated conditions. This work has a guiding role in the optimization process of sensors based on MEMS technique for the consideration of size effect.
- how: In this work the modified strain gradient . . .
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