HIGHLIGHTS
- who: Xiao Li and collaborators from the Thin Physics Division, Department of Physics (IFM), Linku00f6ping University, Linku00f6ping , Sweden have published the paper: Determining role of W+ ions in the densification of TiAlWN thin films grown by hybrid HiPIMS/DCMS technique with no external heating, in the Journal: (JOURNAL)
- what: This study provides direct evidence that the densification effects in TiAlN-based films scale up with the number of W+ ions per deposited metal atom, u03b7=W+/(W + Al + Ti). The authors show that for the identical biasing conditions layers grown at lower u03b7 values (thus . . .
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