Development of a flexible integrated self-calibrating mems pressure sensor using a liquid-to-vapor phase change

HIGHLIGHTS

• who: Yuhong Kang and collaborators from the Inc, Pembroke, VA, USA Department of Mechanical Engineering, Virginia Polytechnic Institute and State University have published the research work: Development of a Flexible Integrated Self-Calibrating MEMS Pressure Sensor Using a Liquid-to-Vapor Phase Change, in the Journal: Sensors 2022, 9737 of /2022/
• what: Among the latest research works, many studies focused on enhancing sensitivity with different methods and materials .
• how: This paper presents a flexible self-calibrating pressure sensor fabricated from a silicon-on-insulator wafer and bonded on a polyimide substrate.
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