Development of the measurement of lateral electron density (mole) probe applicable to low-pressure plasma diagnostics

HIGHLIGHTS

  • who: Si-jun Kim and colleagues from the Department of Plasma Engineering, Institute of Machinery and Materials (KIMM), Institute of Quantum Systems (IQS), Chungnam National University, have published the research: Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics, in the Journal: Sensors 2022, 22, 5487. of /2022/
  • what: As the importance of measuring electron density has become more significant the material fabrication industry various related plasma monitoring tools have been introduced. this paper the development of a microwave probe called the measurement of lateral electron density (MOLE . . .

     

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