HIGHLIGHTS
- who: Positioning Stage Metrology and collaborators from the Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology have published the Article: Diode Wavelength in Miniature Homodyne Interferometer for Long-Stroke Micro/Nano, in the Journal: (JOURNAL)
- what: A laboratory-built prototype of the MHI is constructed and experiments are carried out to demonstrate the feasibility of the proposed wavelength correction and stabilization methods. In this paper, a novel miniature homodyne interferometer (MHI) is designed based on the previous works .
- how: It indicates that the measurement accuracy of . . .
If you want to have access to all the content you need to log in!
Thanks :)
If you don't have an account, you can create one here.