Editorial for a special issue of selected papers from the 23rd annual conference and 12th international conference of the chinese society of micro-nanotechnology (csmnt 2021)

HIGHLIGHTS

• who: Qiyuan Feng and collaborators from the (UNIVERSITY) have published the paper: Editorial for a Special Issue of Selected Papers from the 23rd Annual Conference and 12th International Conference of the Chinese Society of Micro-NanoTechnology (CSMNT 2021), in the Journal: Micromachines 2023, 14, 20. of 13/Dec/2022
• how: Simulations and experimental results showed that the maximum deposition rate error was only 2.0%.
• future: A more accurate rate-dependent piezoelectric actuator nonlinear model is needed for random signal dynamic tracking control systems such as active vibration control.

SUMMARY

 



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