Effect of self-bias on cylindrical capacitive discharge for processing of inner walls of tubular structures—case of srf cavities

HIGHLIGHTS

• who: J. Upadhyay and collaborators from the Center for Accelerator Dominion University Virginia, USA have published the research work: Effect of self-bias on cylindrical capacitive discharge for processing of inner walls of tubular structures—Case of SRF cavities, in the Journal: (JOURNAL) of 22/06/2018
• what: This study presents the analysis of asymmetry scaling in cylindrical coaxial capacitive coupled discharge and the self-bias dependence on gas pressure and rf power using different diameters of the inner electrode.

SUMMARY

Cylindrical coaxial capacitive discharges are the natural choice for discharge . . .

 



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