Effects of carbon doping and dc bias voltage on microstructure and mechanical properties of alcrcn films synthesized via hipims

HIGHLIGHTS

• who: Jian-Fu Tang and colleagues from the Department of Electronic Engineering, Lunghwa University of Science and Technology, Tao-Yuan, Taiwan have published the paper: Effects of Carbon Doping and DC Bias Voltage on Microstructure and Mechanical Properties of AlCrCN Films Synthesized via HiPIMS, in the Journal: Materials 2022, 5729 of 18/08/2022
• what: This work compares the hardness and adhesion properties of AlCrN and AlCrCN hard coatings HiPIMS using Al70 Cr30 and Cr targets. This research of AlCrCN coating was conducted in two parts: assessing the effects of the C2 H2 gas flow . . .
  

   

  

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