HIGHLIGHTS
- who: Liming Liu and collaborators from the School of Materials Science and Engineering, Henan University of Science and Technology, Henan University of Science and Technology, Luoyang, China have published the research work: Effects of Ti Target Purity and Microstructure on Deposition Rate, Microstructure and Properties of Ti Films, in the Journal: Materials 2022, 2661 of /2022/
- what: The authors investigated the effects of Ti target purity and microstructure on film deposition rate surface roughness microstructure and resistivity.
SUMMARY
As the authors know, the Ti target is an indispensable raw material in . . .
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