Emerging applications for high k materials in vlsi technology

HIGHLIGHTS

• who: Robert D. Clark from the (UNIVERSITY) have published the paper: Emerging Applications for High K Materials in VLSI Technology, in the Journal: Materials 2014, 7, 2913-2944 of 27/01/2014
• what: For the purpose of this review High K dielectrics refer to a class of simple binary and ternary metal oxide insulators with a relative dielectric constant greater than about 9 and comprising transition metals from groups 3-5, the lanthanides and Al. As mentioned above, the main motivation for the migration to High K materials was to continue scaling the EOT of . . .
  

   

  

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