Emerging mos2 wafer-scale technique for integrated circuits

HIGHLIGHTS

  • who: Zimeng Ye from the College of Materials Science and Engineering, Sichuan University, Chengdu, Peopleu2019s Republic of China have published the research: Emerging MoS2 Wafer-Scale Technique for Integrated Circuits, in the Journal: (JOURNAL)
  • what: The acquisition of low defect-density and continuous film has gradually become a research focus in 2D materials.
  • how: Cheng et_al pre-treated u00adSiO2/Si substrate with plasma and the results showed that the treated rough area effectively reduced nucleation density and increased film growth rate . The results showed that the side length of triangular u00adMoS2 with PTASassisted . . .

     

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