Enhanced sensitivity of saw-based pirani vacuum pressure sensor

HIGHLIGHTS

  • who: Kanwar J. Singh and colleagues from the (UNIVERSITY) have published the Article: Enhanced Sensitivity of SAW-Based Pirani Vacuum Pressure Sensor, in the Journal: (JOURNAL)
  • what: The authors report that the deposition of an aluminum thin-film layer and rise in the sensor's operating temperature significantly improve the sensitivity of the device.
  • how: Several studies have reported the normal (conventional or white) LiNbO but few data are presented for black LiNbO. By considering C C and 1 the sensitivity variation as a function of decrease in emissivity has been evaluated for . . .

     

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