HIGHLIGHTS
- who: Youcao Ma et al. from the State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China have published the Article: Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing, in the Journal: Materials 2023, 16, 3185. of /2023/
- what: Micro-meter thick PZT films were successfully integrated on a 3-inch silicon wafer via the combination of medium-temperature magnetron sputtering and rapid thermal annealing (RTA).
- how: Experimental results showed that RTA was beneficial to orientations while conventional annealing could promote . . .
If you want to have access to all the content you need to log in!
Thanks :)
If you don't have an account, you can create one here.