Femtosecond laser processing assisted sic high-temperature pressure sensor fabrication and performance test

HIGHLIGHTS

• who: You Zhao and collaborators from the State Key Laboratory for Manufacturing Systems Engineering, Xi`an Jiaotong University, Xi`an, China have published the article: Femtosecond Laser Processing Assisted SiC High-Temperature Pressure Sensor Fabrication and Performance Test, in the Journal: Micromachines 2023, 587 of /2023/
• what: This study proposes a piezoresistive SiC pressure sensor fabrication method to overcome the difficulties in SiC processing especially deep etching. To break through the operating temperature upper limit of current siliconbased high-temperature pressure sensors, this research proposes a fabrication and performance test of an SiC based high . . .
  

   

  

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