Fumed silica-based ultra-high-purity synthetic quartz powder via sol-gel process for advanced semiconductor process beyond design rule of 3 nm

HIGHLIGHTS

• who: Ji-Ho Choi and colleagues from the Department of Electronic Engineering, Hanyang University, Seoul, Republic of Korea have published the research: Fumed Silica-Based Ultra-High-Purity Synthetic Quartz Powder via Sol-Gel Process for Advanced Semiconductor Process beyond Design Rule of 3 nm, in the Journal: Nanomaterials 2023, 390 of /2023/
• what: In this study, therefore, the authors develop a novel fumed silica-based sol-gel process for synthesizing ultra-high-purity quartz powder to achieve the requirements of semiconductor technology with a design rule of 3 nm, i.e., a metal impurity . . .
  

   

  

  If you want to have access to all the content you need to log in!

  Thanks :)

  Username or E-mail:

  If you don't have an account, you can create one here.