HIGHLIGHTS
- who: Zhifan Lin and collaborators from the Laboratory of Science and Technology on Integrated Logistics Support, National University of Defense Technology, Changsha, China have published the article: High-Efficiency Chemical-Mechanical Magnetorheological Finishing for Ultra-Smooth Single-Crystal Silicon, in the Journal: Nanomaterials 2023, 13, 398. of /2023/
- what: The aim of this study is to configure a novel eco-friendly CMMRF fluid to achieve efficient ultra-smooth processing of single-crystal silicon. The concentration of u2261Fe2+ and u2261Fe3+ on the surface of the catalyst is the primary reason why pH influences oxidation activity.
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