High-frequency surface acoustic wave resonator with diamond/aln/idt/aln/diamond multilayer structure

HIGHLIGHTS

  • who: Liang Lei and colleagues from the CollegeHu, China have published the research: High-Frequency Surface Acoustic Wave Resonator with Diamond/AlN/IDT/AlN/Diamond Multilayer Structure, in the Journal: Sensors 2022, 6479 of 23/08/2022
  • what: It canofbe seen that the researchtraditional in this paper has great advantages. mainare reason is that the phase of the SAW wave smaller with increase of the nator compared. The main reason is that the phase velocity wave ismode smaller withhigher the increase of the thickness of the piezoelectric film, and the vp of the higher-order . . .

     

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