Influence of target-substrate distance on the transport process of sputtered atoms: mc-md multiscale coupling simulation

HIGHLIGHTS

• who: Guo Zhu et al. from the School of Mechanical and Electrical Engineering, Hunan City University, Yiyang, China have published the paper: Influence of Target-Substrate Distance on the Transport Process of Sputtered Atoms: MC-MD Multiscale Coupling Simulation, in the Journal: Materials 2022, 15, x FOR PEER REVIEW of 13/Dec/2022
• what: This work provides a scale-matched simulation method for sputtered particle transport.
• how: In this scheme the method was utilized to model the free-flight process of sputtered while the MD model was adopted to simulate the collision between . . .
  

   

  

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