Integrated amplitude and phase monitor for micro-actuators

HIGHLIGHTS

  • who: Sandra Nicole Manosalvas-Kjono and collaborators from the Department of Electrical Engineering, Stanford University, Stanford, CA, USA have published the paper: Integrated Amplitude and Phase Monitor for Micro-Actuators, in the Journal: Micromachines 2022, 13, 1360. of /2022/
  • what: The authors demonstrate that the MAPM circuitry is insensitive to complex relationships between capacitance and position of the MEMS actuators and it is capable of giving real-time readout of the micromirror motion.

SUMMARY

    The the maximum phase 4MAPM, a secondary phase jump atat560.0 Hz,Hz verifying change forwith the . . .

     

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