HIGHLIGHTS
- who: Basma Elsaka et al. from the Institute of Nanostructure Technologies and Analytics (INA) and Center for Interdisciplinary Nanostructure and (CINSaT), University of Kassel, Heinrich-Plett-Str40, Kassel, Germany have published the research work: Investigation of the Influence of Sublayer Thickness on Pairing of Metallic MEMS Shutter Blades, in the Journal: (JOURNAL)
- what: The study focuses on two main geometries: (i) unpaired (freestanding) and_(ii) paired Micro-Electro-Mechanical Systems (MEMS) It has been noticed that the adapted to fit the targeted investigation goal. By finetuning the deposition parameters (i.e., the layer thicknesses), different . . .
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