HIGHLIGHTS
- who: Timothy Draher from the Argonne National Laboratory Illinois University have published the paper: Ion-beam assisted sputtering of titanium nitride thin films, in the Journal: Scientific Reports Scientific Reports of 21/Nov/2022
- what: The authors have investigated the superconducting properties of TiN thin films grown by two different methods: DC reactive sputtering and ion-beam assisted sputtering (IBAS) at room temperature.
SUMMARY
TiN films were deposited on 2-inch high resistance (ρ > 10 k cm) Si wafers with a thin layer of native oxide inside a commercial ultra-high vacuum . . .
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