Kinetic surface roughening and wafer bow control in heteroepitaxial growth of 3c-sic on si(111) substrates

HIGHLIGHTS

• who: Li Wang from the Griffith University have published the article: Kinetic surface roughening and wafer bow control in heteroepitaxial growth of 3C-SiC on Si(111) substrates, in the Journal: Scientific Reports Scientific Reports
• what: In this paper, the impact of growth temperature and substrate off-cut angle on 3C-SiC roughness, crystalline quality, and wafer bow are investigated. In this paper, wafer bow of the bare Si substrates (single-side polished, SSP) and grown 3C-SiC/Si(111) structure was measured using a Tencor Flexus 2320 system and the results are presented in . . .
  

   

  

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