HIGHLIGHTS
- who: Edy Azrak and collaborators from the (UNIVERSITY) have published the research work: Large scale integration of functional radio-frequency flexible MEMS under large mechanical strain, in the Journal: (JOURNAL)
- what: The authors report in situ X-ray diffraction and radio frequency (RF) measurements of the mechanical and electrical properties of MEMS components under uniaxial deformations. As a conclusion, the authors demonstrate an optimized industrial recipe to obtain thin-films and functional MEMS devices on 200 mm diameter polymer substrates.
SUMMARY
2022, 2205404 2205404 (1 of 11) these processes, such as . . .
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