HIGHLIGHTS
- who: Xiang-Yu Ding and colleagues from the Department of Physics, University of Science and Technology of China, Hefei, China have published the research: Maskless Microscopic Lithography through Shaping Ultraviolet Laser with Digital Micro-mirror Device, in the Journal: (JOURNAL)
- what: As a demonstration, the authors here present the ideal of the beam shaping method that will be adopted in the microscopic lithography experiment.
- how: This paper introduces the laser shaping into maskless projection soft lithography by using DMD error-diffusion algorithm and iterative refinement .
SUMMARY
Texas Instruments (TI . . .
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