Mems tunable diffraction grating for spaceborne imaging spectroscopic applications

HIGHLIGHTS

• who: Sanathanan S. Muttikulangara and colleagues from the School of Mechanical and Aerospace Engineering, Nanyang Technological University, Nanyang have published the research work: MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications, in the Journal: (JOURNAL)
• what: The authors have chosen electrostatic actuation that can work in wide range of temperatures and pressures with low power, and can provide sufficient actuation range for the considered application.
• how: This paper describes the analysis of MEMS based analog pitch tunable diffraction grating using Silicon-On-Insulator (SOI) technology. The fabricated PTG was tested in a . . .
  

   

  

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