Method for film thickness mapping with an astigmatic optical profilometer

HIGHLIGHTS

  • who: Hsien-Shun Liao and colleagues from the Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan have published the article: Method for Film Thickness Mapping with an Astigmatic Optical Profilometer, in the Journal: Sensors 2022, 22, 2865. of /2022/
  • what: The authors developed a novel method for film thickness measurement using an astigmatic optical profilometer.
  • how: The fitting curve Cf (i) of the raw data was obtained from the sum of eight sinusoidal functions indicated by the solid red lines in Figure 4cd. Through the same fitting method a pure S-curve . . .

     

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