HIGHLIGHTS
- who: Guido Tosello from the DepartmentTechnical University have published the article: Micro/Nano Manufacturing, in the Journal: Micromachines 2017, 8, 297 of 30/09/2017
SUMMARY
Received Published: 2 October 2017 Micro- and nano-scale manufacturing has been the subject of an increasing amount of interest and research effort worldwide in both academia and industry over the past 10 years. Traditional lithography-based technology forms the basis of silicon-based micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been developed to cover micro-scale dimensions and accuracies. Manufacturing processes . . .
If you want to have access to all the content you need to log in!
Thanks :)
If you don't have an account, you can create one here.