Micromechanical beol robustness evaluation methods enabling loading condition customization and acoustic emission damage monitoring

HIGHLIGHTS

• who: Jendrik Silomon from the University Dresden, Helmholtzstr10, Dresden, Germany have published the research: Micromechanical BEoL robustness evaluation methods enabling loading condition customization and acoustic emission damage monitoring, in the Journal: (JOURNAL)
• what: In this work, three different micromechanical BEoL (Back End of Line) robustness evaluation methods are presented which should enable a more precise and flexible mechanical load induction and damage identification. The overall objective of the methods presented in this work is the determination of BEoL failure modes and the related conditions under which they occur by inducing mechanical load to adjacent electrical . . .
  

   

  

  If you want to have access to all the content you need to log in!

  Thanks :)

  Username or E-mail:

  If you don't have an account, you can create one here.