HIGHLIGHTS
- who: R. C. Woods from the (UNIVERSITY) have published the research work: Microspheres give improved resolution in nondestructive examination of semiconductor devices, in the Journal: (JOURNAL)
SUMMARY
The minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et_al show in a new Light: Science and Applications Article that using an additional glass microsphere in the optical path can improve the resolution significantly. The basic principle conceived by Abbe was that a regular pattern of parallel lines used as . . .
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