HIGHLIGHTS
SUMMARY
The majority of reported MEMS energy harvesters utilize silicon springs with resonant frequencies of hundreds of Hz. Changing the cantilever structural parameters showed a limited effect in reducing the resonant frequency to the ultralow-frequency range and risked inducing structural reliability problems6-8. Liu et_al combined two MEMS resonators in one package to realize a frequency upconversion energy harvester and achieved 618 Hz highfrequency self-oscillation at 36 Hz low-frequency excitation10. The most straightforward and effective solution to the frequency mismatch problem is to reduce the resonant frequency of MEMS energy harvesters to . . .
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