Multiscale simulation of the focused electron beam induced deposition process

HIGHLIGHTS

• who: Pablo de Vera from the Universitat Universidad de Murcia have published the research: Multiscale simulation of the focused electron beam induced deposition process, in the Journal: Scientific Reports Scientific Reports
• what: The authors have demonstrated how to couple detailed space and energy distributions of electrons at the substrate surface (obtained from MC ­calculations23, 30, 31) with radiation-induced dynamics and chemical reactions simulations (by means of the IDMD t­ echnique16, 17) to describe radiation effects at the molecular level for experimentally relevant timescales.

SUMMARY

| Vol:(1234567890) 10:20827 | for uniform . . .

 



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