HIGHLIGHTS
- What: In conventional ellipsometry, the analysis of the sample properties takes place via an integration of the illumination spot size, typically with diameters of the order of 1 mm, unless microspots are used. The authors show that the structural modification of the layer can be studied by means of a very informative statistical pixel-value analysis provided by an imaging ellipsometry setup.
- Who: J. Sens. Sens. Syst. and colleagues from the Physikalisch-Technische Bundesanstalt (PTB), Bundesallee, Braunschweig, Germany , Imaging Physics Department, Faculty of Applied Sciences, Delft University of Technology, Lorentzweg , have published the Article: 109 . . .
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