Optical constant and conformality analysis of sio2 thin films deposited on linear array microstructure substrate by pecvd

HIGHLIGHTS

• who: Yongqiang Pan and collaborators from the School of Opto-Electronic Engineering, Xi`an Technological University, Xi`an, China have published the research: Optical Constant and Conformality Analysis of SiO2 Thin Films Deposited on Linear Array Microstructure Substrate by PECVD, in the Journal: Coatings 2021, 510 of /2021/
• what: In this work, the new method to quantitatively measure the conformality of thin films bottom to the thickness on the flat at the trench mouth opening, as shown in Figure 1a on patterned substrate is proposed.
• how: The XPS results showed that . the deposited . . .
  

   

  

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