Optical for multi-axis angle and displacement measurement using grating reflectors

HIGHLIGHTS

• who: Yuki Shimizu and colleagues from the Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai, Japan have published the Article: Optical for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors, in the Journal: Sensors 2019, 19, x FOR PEER REVIEW of /2019/
• what: In this review Article the state-of-the-art multi-axis optical sensors such as the three-axis autocollimator the three-axis planar encoder and the six-degree-of-freedom planar encoder based on a planar scale grating are introduced. Measurement methods based on the multi-axis Cartesian coordinate system . . .
  

   

  

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