HIGHLIGHTS
- who: MDPI from the Department of Electrical Engineering (ESAT-MICAS), KU Leuven, Leuven, Belgium have published the Article: Optimization in the Design and Fabrication of PZT Piezoelectric Micromachined Ultrasound, in the Journal: (JOURNAL)
- how: This paper presents an optimized way of lead zirconate titanate (PZT) deposition to selectively grow three different (100/001) and_(111) in two different thickness ranges thinner and thicker than 400 nm.
SUMMARY
In recent years, there has been increased interest in piezoelectric micromachined ultrasound transducers (PMUTs) in many applications, such as bio-medical ultrasonic imaging, finger . . .
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