Patterning of silicon substrate with self-assembled monolayers using vertically aligned carbon nanotube electron sources

HIGHLIGHTS

• who: Yi Yin Yu and collaborators from the Department of Information Display, Kyung Hee University, Dongdaemun-gu, Seoul, Republic of Korea have published the paper: Patterning of Silicon Substrate with Self-Assembled Monolayers Using Vertically Aligned Carbon Nanotube Electron Sources, in the Journal: Nanomaterials 2022, 12, x FOR PEER REVIEW of /2022/
• what: In this report, the authors focus on the EBL process by using a combination of vertically aligned carbon nanotubes (VACNTs) as the electron source and octadecyl trichlorosilane (OTS) as SAMs without any electromagnetic focusing components.
• how: For the pattering the . . .
  

   

  

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