HIGHLIGHTS
- who: Abhishek Kumar from the (UNIVERSITY) have published the research: Phototunable chip-scale topological photonics: 160u280bGbps waveguide and demultiplexer for THz 6G communication, in the Journal: (JOURNAL) of 22/08/2022
- how: The detailed simulation results are discussed in Supplementary Information Section S1.
SUMMARY
The VPC cavity-waveguide chip was fabricated on an 8-inch diameter high-resistivity silicon (Si) wafer (ρ > 10 kΩ.cm). The Si wafer was thoroughly cleaned and 4 μm thick silicon-di-oxide (SiO2) layer was deposited. SiO2 was selectively etched away, exposing the Si surface. Deep . . .
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