Preparation of high-quality samples for mems-based in-situ (s)tem experiments

HIGHLIGHTS

  • who: Vesna Srot from the Max Planck Institute for Solid State Research, Stuttgart Center for Electron Microscopy, Stuttgart, Germany have published the paper: Preparation of High-Quality Samples for MEMS-Based In-Situ (S)TEM Experiments, in the Journal: (JOURNAL)
  • what: The authors aimed for a lamellaepreparation procedure that will result in contamination-free and artifact-free electron-transparent samples. The authors report a detailed protocol for the FIB sample preparation of TEM lamellae on MEMS-based chips for in-situ electrical and electro-thermal TEM experiments.
  • future: Latest advancements in in-situ . . .

     

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