Pulse-atomic force lithography: a powerful nanofabrication technique to fabricate constant and varying-depth nanostructures

HIGHLIGHTS

• who: Paolo Pellegrino et al. from the Department of Mathematics and Physics "Ennio Giorgi", University of Salento, Via Monteroni, Lecce, Italy have published the research: Pulse-Atomic Force Lithography: A Powerful Nanofabrication Technique to Fabricate Constant and Varying-Depth Nanostructures, in the Journal: Nanomaterials 2022, 12, 991. of 14/03/2022
• what: The authors propose an evolution of nanoindentation named Microscopy to obtain continuous structures with a controlled depth profile either or variable on a polymer layer. The authors demonstrate how combining the P-AFL technique on a polymer with a plasma etching process, the . . .
  

   

  

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