Q-factor enhancement of coupling bragg and local resonance band gaps in single-phase phononic crystals for tpos mems resonator

HIGHLIGHTS

• who: Lixia Li and collaborators from the School of Mechanical and Electrical Engineering, Xi'an University of Architecture and Technology, Institute of Mechanics, Xi'an University of Architecture and Technology, Xi'an, China have published the article: Q-Factor Enhancement of Coupling Bragg and Local Resonance Band Gaps in Single-Phase Phononic Crystals for TPOS MEMS Resonator, in the Journal: Micromachines 2022, 1217 of 27/07/2022
• what: The research shows that one of the main factors affecting the low Q of TPOS resonators is that when the resonator is working, elastic waves propagate acoustic . . .
  

   

  

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