Reactive hitus tinbvtazrhf-nx coatings: structure, composition and mechanical properties

HIGHLIGHTS

  • who: Frantiu0161ek Lofaj and collaborators from the Institute of Materials Research of the Slovak Academy of Sciences, , Trnava, Faculty of Mathematics, Physics and Informatics, Comenius University in have published the article: Reactive HiTUS TiNbVTaZrHf-Nx Coatings: Structure, Composition and Mechanical Properties, in the Journal: Materials 2023, 563 of /2023/
  • what: The aims of this work included the investigations of the possibilities of the novel High Target Utilization Sputtering (HiTUS) technique applied to sputtering of TiNbVTaZrHf-xN from the viewpoints of hysteresis behavior during sputtering as well as the structure composition stoichiometry and mechanical properties of . . .

     

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