Research on monocrystalline silicon micro-nano structures irradiated by femtosecond laser

HIGHLIGHTS

• who: Yanan Liu and collaborators from the School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, ChinaXinchang Research Institute of Zhejiang University of Technology, Xinchang, China have published the article: Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser, in the Journal: Materials 2022, 15, x FOR PEER REVIEW of /2022/
• what: In this work the laser-induced periodic surface structure (LIPSS) of monocrystalline silicon (Si) under fs laser irradiation is investigated.
• how: The parameters of Si used in the model are listed in Table 1 .
• future: It aims . . .
  

   

  

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